Appendix a – Ocean Optics NanoCalc User Manual

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Ocean Optics Germany GmbH Thin Film Metrology

APPENDIX A

13.1

NanoCalc-Quick-Setup

This Appendix helps you step by step to get a first measurement. This description is using the reference
stepwafer from OceanOptics, SiO2-Steps on Si-Wafer.

Install the NanoCalc software and AD-Converter (see Appendix A)

Start the computer and light source

Plug-In the USB-Cable (or blue AD-Cable), then install fiber cable between the spectrometer and light
source.

Start the NanoCalc software

Put the reference (bare Si-Wafer) on the stage

Click the buttons "continuous mode" and then “reference”

Set the integration time to 3 ms

Now adjust the fiber distance between wafer and fiber in that way that you get the highest possible
signal. A typical distance is 1- 5 mm

Now adjust the integration time in that way that the Max-Level is around 0.8 on your screen

Click again the button "continuous mode" to stop the measurement

Click the button "reference"

Now you are ready to work with the NanoCalc System!