Ocean Optics NanoCalc User Manual

Page 2

Ocean Optics Germany GmbH Thin Film Metrology

CONTENTS

1 Introduction .................................................................................................................................................................... 3

1.1

Measurement setup ............................................................................................................................................. 4

1.2

Measurement signal ............................................................................................................................................ 4

1.3

Physical principle ................................................................................................................................................ 5

Installation .................................................................................................................................................................. 6

Product support ........................................................................................................................................................... 6

Getting started ............................................................................................................................................................. 7

User modes of NanoCalc .......................................................................................................................................... 11

5.1

SCOUT mode ................................................................................................................................................... 11

5.2

Internal mode .................................................................................................................................................... 11

5.3

Combiversion with NanoCalc ........................................................................................................................... 11

5.4

List of all menus and buttons ............................................................................................................................ 12

Basic features of NanoCalc ....................................................................................................................................... 13

6.1

Reference .......................................................................................................................................................... 13

6.2

Measure............................................................................................................................................................. 14

6.3

Simulate ............................................................................................................................................................ 15

6.4

Analyze ............................................................................................................................................................. 15

6.5

Continuous mode .............................................................................................................................................. 16

6.6

Measurement mode ........................................................................................................................................... 16

6.7

Fitness ............................................................................................................................................................... 18

Detailed features of NanoCalc .................................................................................................................................. 19

7.1

Main menu “File” ............................................................................................................................................. 19

7.1.1

Load file .................................................................................................................................................... 19

7.1.2

Load layer recipe ...................................................................................................................................... 19

7.1.3

Save as file ................................................................................................................................................ 20

7.1.4

Save as layer recipe ................................................................................................................................... 20

7.1.5

Save reference and dark ............................................................................................................................ 21

7.1.6

Save as reference system .......................................................................................................................... 21

7.1.7

Load reference and dark ............................................................................................................................ 21

7.1.8

Load last measurement ............................................................................................................................. 21

7.1.9

Load last saved file ................................................................................................................................... 21

7.1.10

Import raw data ......................................................................................................................................... 21

7.1.11

Export raw data ......................................................................................................................................... 21

7.1.12

Print report ................................................................................................................................................ 22

7.1.13

Show all results ......................................................................................................................................... 22

7.1.14

Exit ............................................................................................................................................................ 22

7.1.15

Function keys ............................................................................................................................................ 22

7.2

Main menu “Screen” ......................................................................................................................................... 23

7.2.1

Spectrometer data ..................................................................................................................................... 23

7.2.2

Hardware settings ............................................................................... Fehler! Textmarke nicht definiert.

7.2.3

Limits ........................................................................................................................................................ 25

7.2.4

Dispersion ................................................................................................................................................. 27

7.2.5

Pixel resolution ......................................................................................................................................... 28

7.2.6

Show intensity........................................................................................................................................... 29

7.3

Main menu “Data Editor” ................................................................................................................................. 30

7.3.1

Modify old .dat-files ................................................................................................................................. 30

7.3.2

Save DAT-files ......................................................................................................................................... 30

7.3.3

Create Cauchy .dat-file ............................................................................................................................. 31

7.3.4

Create EMA dat-file .................................................................................................................................. 31

7.4

Main menu “Externals”..................................................................................................................................... 33

7.4.1

Mapping .................................................................................................................................................... 33

7.4.2

Result List ................................................................................................................................................. 40

7.4.3

Analyze mapped data ................................................................................................................................ 41

7.4.4

Structure of .map-file ................................................................................................................................ 41