Ocean Optics NanoCalc - Manual (Page 81)

Ocean Optics Germany GmbH Thin Film Metrology
80
RTL-Stage with 2 COL-UV lenses (Transmission mode)
Change to Transmission mode and go to menu Options > Measurement mode > Transmission.
Please accept that Nb
2
O
5
has a higher reflectivity than glass without coating, therefore we have to adjust the
integration time with the substrate plus layer first and take the reference from the substrate without any
changes.
Put the Nb
2
O
5
glass on the RTL-Stage.
Click on the button "continuous mode".
Adjust the fiber distance between wafer and fiber in that way that you get the highest signal. A typical
distance is 1 - 5 mm.
Now adjust the integration time in that way that the Max-Level is around 0.8.
Now put the reference glass (BK7) on the table.
Click the "reference" button.
Now you are ready to measure
.
Fiber to the spectrometer
C-UV lenses
Sample (Nb
2
O
5
on Borosilicat40)
Fiber from the light source
RTL-Stage