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Ocean Optics NanoCalc User Manual

Page 77

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Ocean Optics Germany GmbH Thin Film Metrology

76

Measure the reference again

Then put the first step of the wafer under the fiber and push the button "measure" than "analyze".

The two curves from measure and analyze should be nearly the same. How good they fit can you see in the
right lower corner as “fitness” (=Quality of Fit).

Please try the other steps on the wafer.

Save these settings as a recipe in menu “File” and “Save as recipe” under the name “Si_SiO2.lrc”.