Ocean Optics NanoCalc - Manual (Page 36)

Ocean Optics Germany GmbH Thin Film Metrology
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analyze
you can analyze the layer thickness your sample. Thus you can control all settings before you start the
mapping
conti
you can take a reference or a measurement in continuous mode.
initialize stage:
After starting mapping mode you have to initialize the mapping stage first.
Until the mapping stage is initialized the function start mapping is deactivated.
start mapping
this will start the mapping sequence
cancel
leave mapping mode
scan mode:
a. shape of the wafers:
1. You may use square or round wafers.
2. To use your
own design as a background you need to edit the file
OwnDesign.bmp (this is possible with lots of drawing programs or ask
your software supplier for help).
b. wafer size
Wafer size may be changed between 50 mm and 300 mm (= 12'').
A grid is shown with a constant grid distance (e.g. 10 mm).
c. scan region
It is possible to change:
- the x and y coordinates of the origin in steps of 0.1 mm
- the number of rows and the number of columns of the scanning grid
(from 1 to 100)
- the size of the x and y steps (in multiples of 0.1 mm)
The wafer plot shows what you are doing.
d. rotation
here you can rotate the scan region