Ocean Optics NanoCalc - Manual (Page 70)

Ocean Optics Germany GmbH Thin Film Metrology
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10.4 How to measure rough, thick films
If the films or the substrate surfaces are rough it gets more and more difficult to get good results because of
scattering effects. Sometimes it is still possible to measure a signal, but usually the amplitude and offsets are
drastically different from theory. Nevertheless: if the film thickness is big enough, the spectrum has enough
wiggles so that analyzing becomes possible.
In menu “data extraction” you find some options to adjust to roughness problems.