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Ocean Optics NanoCalc User Manual

Page 3

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Ocean Optics Germany GmbH Thin Film Metrology

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7.4.5

Online/multipoint measurements .............................................................................................................. 42

7.4.6

Analyze online/multipoint data ................................................................................................................. 45

7.4.7

Structure of .onl-file .................................................................................................................................. 46

7.4.8

RS232 ....................................................................................................................................................... 46

7.4.9

Vision system ............................................................................................................................................ 46

7.5

Main menu “Options” ....................................................................................................................................... 47

7.5.1

Change buttons ......................................................................................................................................... 47

7.5.2

Roughness ................................................................................................................................................. 48

7.5.3

Special modes ........................................................................................................................................... 49

7.5.4

Fit parameters ........................................................................................................................................... 51

7.5.5

Some setups .............................................................................................................................................. 51

7.5.6

Measurement mode ................................................................................................................................... 52

7.5.7

Operator mode .......................................................................................................................................... 52

7.5

Main menu “Version” ....................................................................................................................................... 54

7.6

Chart and chartdesigner .................................................................................................................................... 54

8

Special features for “SCOUT mode” ........................................................................................................................ 55

8.1

Main menu “File” ............................................................................................................................................. 55

8.1.1

Change layer recipe................................................................................................................................... 55

9

Special features for “internal mode” ......................................................................................................................... 57

9.1

EditStructure button .......................................................................................................................................... 58

9.1.1

General ...................................................................................................................................................... 58

9.1.2

Catalogues ................................................................................................................................................. 59

9.1.3

Materials ................................................................................................................................................... 59

9.1.4

Thickness .................................................................................................................................................. 59

9.1.5

Estimates ................................................................................................................................................... 59

9.1.6

Fixed limits ............................................................................................................................................... 60

9.1.7

Narrow Limits ........................................................................................................................................... 60

9.1.8

Wide Limits .............................................................................................................................................. 60

9.1.9

User limits ................................................................................................................................................. 60

9.1.10

Number of layers ...................................................................................................................................... 61

9.1.11

Layer commands ....................................................................................................................................... 61

10

Experimental setups and problems ....................................................................................................................... 64

10.1

General .............................................................................................................................................................. 64

10.1.1

Experimental setup ................................................................................................................................... 64

10.1.2

Reference spectrum ................................................................................................................................... 64

10.1.3

Maximum intensity ................................................................................................................................... 64

10.1.4

Polarization ............................................................................................................................................... 64

10.1.5

Angle of incidence .................................................................................................................................... 65

10.1.6

Signal to noise ratio .................................................................................................................................. 65

10.1.7

Stray light .................................................................................................................................................. 65

10.1.8

Fiber .......................................................................................................................................................... 65

10.1.9

Absorbing media ....................................................................................................................................... 65

10.1.10

Passwords.............................................................................................................................................. 65

10.1.11

Function buttons ................................................................................................................................... 66

10.2

How to measure very thin films ........................................................................................................................ 67

10.3

How to measure very thick films ...................................................................................................................... 68

10.4

How to measure rough, thick films ................................................................................................................... 69

11

Physical explanations ............................................................................................................................................ 70

11.1

Refraction index and absorption indices ........................................................................................................... 70

11.2

Cauchy coefficients ........................................................................................................................................... 70

11.3

Interference ....................................................................................................................................................... 71

12

Thinfilm.ini ........................................................................................................................................................... 72

13

APPENDIX A ....................................................................................................................................................... 74

13.1

NanoCalc-Quick-Setup ..................................................................................................................................... 74