Ocean Optics NanoCalc User Manual
Page 3
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Ocean Optics Germany GmbH Thin Film Metrology
2
7.4.5
Online/multipoint measurements .............................................................................................................. 42
7.4.6
Analyze online/multipoint data ................................................................................................................. 45
7.4.7
Structure of .onl-file .................................................................................................................................. 46
7.4.8
RS232 ....................................................................................................................................................... 46
7.4.9
Vision system ............................................................................................................................................ 46
7.5
Main menu “Options” ....................................................................................................................................... 47
7.5.1
Change buttons ......................................................................................................................................... 47
7.5.2
Roughness ................................................................................................................................................. 48
7.5.3
Special modes ........................................................................................................................................... 49
7.5.4
Fit parameters ........................................................................................................................................... 51
7.5.5
Some setups .............................................................................................................................................. 51
7.5.6
Measurement mode ................................................................................................................................... 52
7.5.7
Operator mode .......................................................................................................................................... 52
7.5
Main menu “Version” ....................................................................................................................................... 54
7.6
Chart and chartdesigner .................................................................................................................................... 54
8
Special features for “SCOUT mode” ........................................................................................................................ 55
8.1
Main menu “File” ............................................................................................................................................. 55
8.1.1
Change layer recipe................................................................................................................................... 55
9
Special features for “internal mode” ......................................................................................................................... 57
9.1
EditStructure button .......................................................................................................................................... 58
9.1.1
General ...................................................................................................................................................... 58
9.1.2
Catalogues ................................................................................................................................................. 59
9.1.3
Materials ................................................................................................................................................... 59
9.1.4
Thickness .................................................................................................................................................. 59
9.1.5
Estimates ................................................................................................................................................... 59
9.1.6
Fixed limits ............................................................................................................................................... 60
9.1.7
Narrow Limits ........................................................................................................................................... 60
9.1.8
Wide Limits .............................................................................................................................................. 60
9.1.9
User limits ................................................................................................................................................. 60
9.1.10
Number of layers ...................................................................................................................................... 61
9.1.11
Layer commands ....................................................................................................................................... 61
10
Experimental setups and problems ....................................................................................................................... 64
10.1
General .............................................................................................................................................................. 64
10.1.1
Experimental setup ................................................................................................................................... 64
10.1.2
Reference spectrum ................................................................................................................................... 64
10.1.3
Maximum intensity ................................................................................................................................... 64
10.1.4
Polarization ............................................................................................................................................... 64
10.1.5
Angle of incidence .................................................................................................................................... 65
10.1.6
Signal to noise ratio .................................................................................................................................. 65
10.1.7
Stray light .................................................................................................................................................. 65
10.1.8
Fiber .......................................................................................................................................................... 65
10.1.9
Absorbing media ....................................................................................................................................... 65
10.1.10
Passwords.............................................................................................................................................. 65
10.1.11
Function buttons ................................................................................................................................... 66
10.2
How to measure very thin films ........................................................................................................................ 67
10.3
How to measure very thick films ...................................................................................................................... 68
10.4
How to measure rough, thick films ................................................................................................................... 69
11
Physical explanations ............................................................................................................................................ 70
11.1
Refraction index and absorption indices ........................................................................................................... 70
11.2
Cauchy coefficients ........................................................................................................................................... 70
11.3
Interference ....................................................................................................................................................... 71
12
Thinfilm.ini ........................................................................................................................................................... 72
13
APPENDIX A ....................................................................................................................................................... 74
13.1
NanoCalc-Quick-Setup ..................................................................................................................................... 74