Ocean Optics NanoCalc User Manual
Page 32
Ocean Optics Germany GmbH Thin Film Metrology
31
7.3.3
Create Cauchy .dat-file
Creating new Cauchy dat-files:
It is only possible to create new DAT-
files with cauchy coefficients, not as a
table of index data. To create a table you
have to use an external text editor.
1.
At first you will see three
wavelengths and 6 Cauchy
coefficients n0, n1, n2, k0, k1and k2
2.
change these values according to
your information. You have to add
ALL three values.
3.
click on create Cauchy coefficients
4.
then click on “save DAT-file” or click
“reset modifications”
Then the software will automatically
switch to the page “save DAT-file”.
7.3.4
Create EMA dat-file
Creating new EMA dat-files:
An EMA-file is a mixture of 2 different dispersion
values. There are different mixture algorithms in the
literature. In NanoCalc only the simple Looyenga
method (=a linear mixture) and the Bruggeman
method are implemented.
The structure of an EMA dat-file is rather similar to 2
added normal dat-files. Here you see an example for
Poly-silicon as a mixture of
crystalline silicon
and
amorphous silicon
(it is also possible to construct such
a file manually with every text editor)
Si_cr.100(Aspnes_mod.)
633,3.8714,0.0158
150,1100
EMA_Mixture=Si_(100),a_Si,Bruggeman,50.0_Perc
ent
Table
150,0.5100,2.1500
151,0.5000,2.1500
152,0.5000,2.1500
….