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Measurement setup, Measurement signal – Ocean Optics NanoCalc User Manual

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Ocean Optics Germany GmbH Thin Film Metrology

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1.1

Measurement setup


A broadband white light source is reflected by a thin layer under vertical incidence (after a calibration
measurement). The reflected intensity as a function of wavelength is measured by a spectrometer, a PC
extracts the wanted information.

1.2

Measurement signal

The typical modulated signal of such a spectroscopic thin film measurement might look like this (after some
data manipulations):

NanoCalc uses this signal to extract thickness (eventually also dispersion) for this (SiO

2

) layer on Si.

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Fibercable

Thin Layer

NanoCalc-2000