Figure 9-1, D table 9-4. the e52 – Agilent Technologies Agilent E5250A User Manual

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9-8

Agilent E5250A User’s Guide, Edition 11

Executing Sample Programs
Vth and Capacitance Measurement Program

Figure 9-1

Vth and C Measurement Setup and DUT Connection

Table 9-4

Instrument and DUT Connection

Instrument E5250A

DUT Terminal (via

Connector Plate)

Model No.

Measurement

Port

Input Port

Output Port

4155/4156

SMU 1

SMU INPUT 1

OUTPUT 1

MOSFET Drain

SMU 2

SMU INPUT 2

OUTPUT 2

MOSFET Gate

SMU 3

SMU INPUT 3

OUTPUT 3

MOSFET Source

SMU 4

SMU INPUT 4

OUTPUT 4

MOSFET Substrate

4284A

Hp, Hc

AUX INPUT CV1

OUTPUT 5

Capacitance (H)

Lp, Lc

AUX INPUT CV2

OUTPUT 6

Capacitance (L)