AMETEK SFA Series Ethernet Programming - Manual (Page 130)

SCPI Command Operation SG Series Programming
6-58 M550129-03 Rev K
To stop the execution of the square wave sequence, issue the STOP
state command:
PROG:STAT STOP
The sequence should stop running while the unit remains at the state of
the last command within the sequence.
To pause instead of stop, issue the PAUSE state command instead:
PROG:STAT PAUSE
After pausing, the output will remain at its present value.