Super Systems PC Configurator 2 - Manual (Page 179)

Super Systems Inc. Page 179 of 201 Configurator Manual #4562 Rev D
120 ATM_INQ % Carbon Inquiry N/A Atmosphere
level
Wait, Wait Up,
Wait Down
121 MV_INQ Millivolt Inquiry N/A Millivolt level Wait, Wait Up,
Wait Down
122 PIDLOAD Load PID Set Loop 2 Set Loop 1 Set Loop 3 Set
123 SETVALVE Set valve setpoint Setpoint Trim range Valve number (0-
3)
124 SETBP
(SETLP3)
Set back pressure
(loop 3) setpoint
Setpoint N/A N/A
125 SETFCM Set flow control
mode (Nitrider)
N/A N/A Control mode
126 IN_INQ Input inquiry Input value Which Input Wait, Wait Up,
Wait Down
127 CC_SP_L Set setpoint limits
for cascade
SP lower limit SP upper
limit
N/A
128 TC_CHK Activate or
deactivate TC check
Source 1 Source 2 Source 3
129 SET_SL_VAL Set slave value Data value Register
number
Instrument
number
130 PLC_SET_VAL PLC set value Data value Register
number
None, Wait, Wait
Up, Wait Down
131 OGholdm Out gas hold micron N/A Micron level Gage; 0 turns off
else gage 1,2,3,
or 4
132 Ogholdt Out gas hold torr N/A Torr level Gage; 0 turns off
else gage 1,2,3,
or 4
133 VLUP_ch Vacuum leak up
check
Test pass step Test retry
step
Test fail step
Notes About Opcodes
1. A Temperature column value of –301 disables the temperature data.
2. A vacuum column value of –1 disables the vacuum data column for non-vacuum
opcodes.
3. Temperature PO (percent output) values for HIGH_PO, LOW_PO, and PO_INQ are offset
by a value of –200, i.e., -300 to –100 represents –100 to 100.
4. Atmosphere PO (percent output) values for HIGH_PO, LOW_PO, and PO_INQ are offset
by a value of +100, i.e., 0 to 200 represents –100 to 100.
5. Wait is until in band, Wait up and Wait down are until value is reached +/- 1.
6. GRAMP is the same as RAMP, except that the temperature must be in band for GRAMP.
7. Load TCs can hold RAMP if they are enabled.
8. GSOAK is the same as SOAK, except that the temperature must be in band for GSOAK.
9. RAMPR uses a rate specification instead of time. This applies only to temperature.
10. GLSOAK is the same as GSOAK, except that only the low band limit applies, i.e., PV > SP
– limit.
11. GHSOAK is the same as GSOAK, except that only the high band limit applies, i.e., PV <
SP + limit.
12. The Max hold time in the vacuum column overrides the default max hold time for the
current step only.
13. The multiple event opcodes use a bit map mask to identify what events are addressed,
and a bit for the OFF/ON state of those events.