INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 91)

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IQS-233 Operating Manual
2.3.4.3 Rate Graph
Click View >> Rate Graph to display a graph of Deposition Rate as the main graph
on the IQS-233 Codeposition window. This graph is useful during shutter delay,
rate ramp, and deposition.
2.3.4.4 Deviation Graph
Click View >> Deviation Graph to display a graph of Rate Deviation as the main
graph on the IQS-233 Codeposition window. This graph is useful for fine tuning PID
control loop. See
Chapter 4, Calibration Procedures .
2.3.4.5 Power Graph
Click View >> Power Graph to display a graph of Output Power as the main graph
on the IQS-233 Codeposition window. This graph is useful during the
preconditioning, Feed, and Hold phases. It can also be useful during the deposition
phases to detect error conditions, which cause oscillations.
2.3.4.6 Sensors Graph
Click View >> Sensors Graph to display the rate readings from each individual,
assigned sensor as the main graph on the IQS-233 Codeposition window. It is a
graphical display of the Rate column of the Sensor Readings window (refer to
section 2.3.4.2 on page 2-69 ).
2.3.4.7 Automatic
Click View >> Automatic to display a graph of the most pertinent information for
each phase as the main graph on the IQS-233 Codeposition window.
 The Power Graph is displayed during preconditioning.
 The Rate Graph is displayed during shutter delay, rate ramps, and deposition.
 The Power Graph is displayed during the Feed and Hold phases.