INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
Physical Sensor # . . . . . . . None, 1 to 6 (IQM-233 cards)
None, 1 to 8 (SQM-242 cards)
The Physical Sensor numbers 1 to 3 or 1 to 4
correspond to the same numbered sensor
connection on the IQM-233 or SQM-242 card,
respectively. The Physical Sensor numbers 4 to 6 or
5 to 8 correspond to the sensor connections 1 to 3 or
1 to 4 on the second IQM-233 or SQM-242 card,
respectively. Refer to the IQM-233 or SQM-242
operating manual for information about the sensor
connections.
NOTE: When two cards are installed, computers
may vary in which PCI express slot
corresponds to card 1 (Physical Sensor
numbers 1 to 3 or 1 to 4).
Dual . . . . . . . . . . . . . . . . . . Select the Dual check box to select the
corresponding sensor pair as the primary and
secondary channels of a dual sensor. If a crystal fail
occurs for the primary channel, the dual sensor
shutter exposes the secondary crystal and the
secondary channel is used for measurement. A PLC
is required to provide the relay for the dual sensor
shutter (see
Monitor Output . . . . . . . . . . None, Output 1 to 6 (IQM-233 cards)
None, Output 1 to 4 (SQM-242 cards)
Select the name of an Output to map to the
corresponding sensor. Multiple sensors may be
mapped to the same Output name for sensor rate
averaging.