INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 57)

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IQS-233 Operating Manual
Sensor Tooling (%) pane
Compensates for differences due to sensor and substrate geometry of the
Thickness measured by the sensor and the actual Thickness of material deposited
on the substrate (see
section 4.3 on page 4-2 ). A value of 0.0 makes a sensor
unavailable.
Sensor 1 to 6 (IQM-233) . . . 0.0 to 999.0%
Sensor 1 to 8 (SQM-242) . . 0.0 to 999.0%
2.3.3.5.11 Errors Tab
Error detection and the action to occur upon the error are configured in the Errors
tab. See
Figure 2-32 .
Figure 2-32 Film Edit window - Errors tab
HINT: Until the stability and repeatability of the Process has been established, the
Enabled check boxes for Control Error, Crystal Quality, and Crystal
Stability should be cleared, and the check box for Crystal Fail be selected.
On Error pane
The selected action is initiated if an error condition occurs as determined by the
Control Error pane selections. The possible actions are:
Ignore . . . . . . . . . . . . . . . . . All error conditions are ignored. The PID loop
attempts to control the rate until the deposition
phase is completed.