INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 12)

1 - 2
IP
N 07
4-
58
5-
P1
A
IQS-233 Operating Manual
1.1.1 IQS-233 Codeposition Software Features
 Supports up to two IQM-233 cards
 Measures up to six quartz crystal sensors simultaneously
 Controls up to six deposition source power supplies simultaneously for
codeposition.
 Supports up to two SQM-242 cards (SAM-242 card not supported)
 Measures up to eight quartz crystal sensors simultaneously
 Controls up to four deposition source power supplies simultaneously for
codeposition
 Allows multi-layer processes
 Provides preconditioning, multiple rate ramps, and feed/idle phases
 Provides graphs of deposition rate, rate deviation, or power output
 Stores process, film and material parameters.
 Can be controlled remotely from another computer using the RS-232 or
Ethernet command protocol
 Provides flexible and reliable digital I/O using an external Programmable Logic
Controller (PLC)
 Easy PLC integration for event selectable relay commands and shutter
control
NOTE: PLC is not provided by INFICON.
1.1.2 Hardware Supported by IQS-233 Codeposition Software
IQS-233 Codeposition software supports IQM-233 or SQM-242 cards (see
Figure 1-2 and Figure 1-3 ). Up to two IQM-233 or up to two SQM-242 cards can be
installed in the same computer with IQS-233 Codeposition software.
NOTE: If IQM-233 and SQM-242 cards are installed in the same computer,
IQS-233 Codeposition software will automatically select IQM-233 card(s)
and ignore SQM-242 card(s).
Refer to the IQM-233 or SQM-242 operating manuals for detailed information on
installing and using IQM-233 and SQM-242 cards.