INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 17)

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IQS-233 Operating Manual
Rate Sampling . . . . . . . . . . . Continuous, Accuracy Based, Time Based
Accuracy Based . . . . . . . . . . 0.00 to 100.00%
Time Based Sample . . . . . . . 0.00 to 100.00 s
Time Based Hold . . . . . . . . . 0.00 to 100.00 s
Ramp (1, 2) Power . . . . . . . . 0.00 to 100.00%
Ramp (1, 2) Time . . . . . . . . . 0.00 to 30000 s
Soak (1, 2) Time . . . . . . . . . . 0.00 to 30000 s
Feed Power . . . . . . . . . . . . . 0.00 to 100.0%
Feed Ramp Time . . . . . . . . . 0.00 to 100 s
Feed Time . . . . . . . . . . . . . . 0.00 to 100 s
Idle Power . . . . . . . . . . . . . . 0.00 to 100.0%
Idle Ramp Time . . . . . . . . . . 0.00 to 100 s
Material. . . . . . . . . . . . . . . . . Any defined material
Max Power . . . . . . . . . . . . . . 0.00 to 100.00%
Slew Rate . . . . . . . . . . . . . . . 0.0 to 100.0%
Sensor Tooling . . . . . . . . . . . IQM-233: 1 to 6, 0.0 to 999.0%
SQM-242: 1 to 8, 0.0 to 999.0%
On Error . . . . . . . . . . . . . . . . Ignore, Stop Layer, Timer Power
Control Error %. . . . . . . . . . . 0 to 30%
Control Error sec . . . . . . . . . 0 to 99 s
Crystal Fail Counts . . . . . . . . 0 to 99
Crystal Quality % . . . . . . . . . 0 to 50%
Crystal Quality Counts . . . . . 0 to 99
Crystal Stability Single . . . . . 25 to 9999 Hz
Crystal Stability Total . . . . . . 25 to 9999 Hz
1.3.4 Material Parameters
Name . . . . . . . . . . . . . . . . . . 24 characters maximum
Density . . . . . . . . . . . . . . . . . 0.40 to 99.99 g/cm
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Z-Factor . . . . . . . . . . . . . . . . 0.100 to 9.999