INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 86)

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IQS-233 Operating Manual
2.3.4 View
Click View on the menu bar to display the list of items related to informational
readouts (see
Figure 2-50 ). From this list, various graphs and readouts can be
selected for display, frequently accessed Process parameters can be displayed or
hidden, and standard or high resolution can be selected for the Rate and Thickness
readouts.
Figure 2-50 View list
 Film Settings, see section 2.3.4.1
 Sensor Readings, see section 2.3.4.2 on page 2-69
 Rate Graph, see section 2.3.4.3 on page 2-71
 Deviation Graph, see section 2.3.4.4 on page 2-71
 Power Graph, see section 2.3.4.5 on page 2-71
 Sensors Graph, see section 2.3.4.6 on page 2-71
 Automatic, see section 2.3.4.7 on page 2-71
 High Resolution, see section 2.3.4.8 on page 2-72
2.3.4.1 Film Settings
Displays or hides a pane of frequently used Layer parameters. The displayed
parameter values are for the active Layer of a Process and these values are
updated at the start of the Layer.
 If Auto mode is selected, parameters used for PID loop source control are
displayed (see
Figure 2-51 ).
 If Manual mode is selected, parameters used for manual source control are
displayed (see
Figure 2-52 on page 2-68 ).
Parameter values can be edited whether a Process is started or stopped. Changing
the value of a parameter also changes the value of the same parameter residing in
another location.
When the process is stopped, additional parameters can be accessed from the Edit
item list (refer to
section 2.3.3.5 on page 2-17 ).