INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 69)

2 - 49
IP
N 07
4-
58
5-
P1
A
IQS-233 Operating Manual
Control. . . . . . . . . . . . . . . . . Rate, Thick
Select the Rate check box to use the corresponding
sensor for PID control of the mapped output and
contribute to rate averaging if other sensors are
mapped to the same output.
Select the Thick check box to have the
corresponding sensor provide a Thickness reading
in the Reading window (View >> Sensor Readings)
and contribute to the aggregate Thickness reading in
the IQS-233 Codeposition window.
Clear the Rate and Thick check boxes for the
corresponding sensor to monitor a deposition with
no PID control of the mapped output. This sensor will
be removed from rate averaging if other sensors are
mapped to the same output. The deposition phase
will not stop when the Final Thickness value is
reached assuming no other sensors being used
have the Thick check box selected.