INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
Time (Phase) . . . . . . . . . . . The left-side displays the time remaining until the
current phase ends. The right-side displays the
elapsed time for:
entire preconditioning phase
Deposition phase
entire Feed phase
entire Idle phase
Progress . . . . . . . . . . . . . . . Bar graph displaying an indication of the progress of
the current phase.
Film . . . . . . . . . . . . . . . . . . . The name of the Film used for the current Layer.
Rate Å/s . . . . . . . . . . . . . . . The calculated rate of deposition at the substrate. If
more than one sensor is mapped to the Output used
by the current Layer, the displayed rate is an
average of the rates for those individual sensors.
NOTE: To display the Readings window where
Rates for individual sensors are displayed,
click View >> Sensor Readings on the menu
bar.
Rate stability is affected by the PID loop
values in the Deposit tab on the Film Edit
window. Refer to
.
Rate accuracy is affected by:
Density and Z-Ratio values in the
Materials window. Refer to
section 2.3.3.5.12 on page 2-42
Tooling value(s) in the Source/Sensor tab
on the Film Edit window. Refer to
section 2.3.3.5.10 on page 2-36
Period value in the Card tab on the
System Setup window. Refer to
section 2.3.3.6.5 on page 2-56
.
Dev (%) . . . . . . . . . . . . . . . . Percentage deviation of the Rate (Å/Sec) display
from the desired rate setting in the Source Setup
window.