INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
7
Select Rate and/or Thickness control for each sensor. If neither Rate nor
Thickness are selected, the crystal will only monitor the process, and the
displayed rate and thickness for that sensor will not be used for PID control.
NOTE: Refer to the IQM-233 or SQM-242 operating manual for information
about the sensor connection.
8
Click OK to save changes.
9
If using an indexer:
9a
Click Edit >> System and select Indexers tab (refer to
).
9b
Enter the Timeout for each source or layer indexer connected to the
IQM-233 or SQM-242 card.
9c
Test each indexer prior to starting the process. Refer to
section 2.3.3.6.3 on page 2-50
NOTE: Refer to the IQM-233 or SQM-242 operating manual for information
about indexer connections.
9d
Click OK to save changes.
10
If using a PLC:
10a
Click Edit >> System and select I/O tab (refer to
).
10b
Select Relay and Input Events to be controlled by the PLC.
10c
Select the PLC Comm Port and Address.
10d
Test each event prior to starting the process. Refer to
.
10e
Click OK to save changes.
11
Click Edit >> System and select Card tab (refer to
).
12
Select a measurement period from the Period (sec) list.
NOTE: Longer measurement periods will increase the resolution of the
IQM-233 card PID control loop.
13
Enter maximum, initial, and minimum frequency for the crystal that will be used
in the process.
14
Click OK to save changes.
15
If using remote communication:
15a
Click Edit >> System and select Comm tab (refer to
).