INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 46)

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IQS-233 Operating Manual
2.3.3.5.5 Rate Ramps Tab
Click the Rate Ramps tab to display the Rate Ramp parameters (see Figure 2-23 ).
Rate Ramps allow for more than one deposition rate during the deposition phase.
Each Layer of a Process can have an unlimited number of Rate Ramps. Each Rate
Ramp consists of a Start Thickness value that initiates ramping to the Setpoint
value of a new rate, and a Ramp Time value for the time required to ramp to the
new rate Setpoint value.
Figure 2-23 Process window - Rate Ramps tab
Start Thickness (kÅ) . . . . . 0.000 to 999.900 kÅ
The value that, when reached, initiates a timed ramp
to a new rate. The Start Thickness value should be
greater for each subsequent ramp and less than the
Final Thickness of the Layer; otherwise, the Rate
Ramp is ignored.
Ramp Time (sec). . . . . . . . . 0.00 to 30000 s
The time in seconds required to achieve the new rate
Setpoint value.
Setpoint (Å/s) . . . . . . . . . . . -999.90 to 999.90 Å/s
Setpoint (Å/s) is displayed instead of Setpoint % Pwr
when Sensor(s) is selected in the Input box on the
Layer tab. Setpoint (Å/s) is the value of a new rate.