INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
Crystal Stability pane
When material is being deposited, crystal frequency normally decreases. However,
near the end of crystal life, the crystal frequency may briefly "mode hop" to higher
frequencies. Other causes of a frequency increase include thermal effects, material
stress, and e-beam arcing. A Crystal Stability error will occur if the specified
magnitude of positive frequency increase is exceeded or the specified sum of
positive frequency increases is exceeded.
Enabled . . . . . . . . . . . . . . . Select the check box to activate the Crystal Stability
command.
Single Hz . . . . . . . . . . . . . . . 25 to 9999
The largest single frequency increase allowed during
the deposition phase. If this value is exceeded, the
On Error action is initiated and the message Xtal
Fail: Sensor x Stab is displayed.
Total Hz . . . . . . . . . . . . . . . . 25 to 9999
The maximum sum allowed for frequency increase
events occurring during the deposition phase, If this
value is exceeded, the On Error action is initiated
and the message Xtal Fail: Sensor x Stab is
displayed.
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