INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 89)

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IQS-233 Operating Manual
I Term . . . . . . . . . . . . . . . . . . . . . . . . 0.0 to 999.9
D Term . . . . . . . . . . . . . . . . . . . . . . . 0.00 to 99.90
Ctrl Acc . . . . . . . . . . . . . . . . . . . . . . 0 to 30%
Max Power. . . . . . . . . . . . . . . . . . . . 0.00 to 100.00%
Slew Rate . . . . . . . . . . . . . . . . . . . . 0 to 100%/sec
Feed Power . . . . . . . . . . . . . . . . . . . 0.00 to 100.00%
Feed Ramp . . . . . . . . . . . . . . . . . . . 0 to 30000 sec
Feed Time . . . . . . . . . . . . . . . . . . . . 0 to 30000 sec
Idle Power . . . . . . . . . . . . . . . . . . . . 0.00 to 100.00%
Idle Ramp . . . . . . . . . . . . . . . . . . . . 0 to 30000 sec
Frequently Used Parameters—Manual Mode
Final Thickness . . . . . . . . . . . . . . . 0.000 to 999.900 kÅ
Max Power. . . . . . . . . . . . . . . . . . . . 0 to 100%
Manual Power . . . . . . . . . . . . . . . . . 0.00 to 100.00%
2.3.4.2 Sensor Readings
Click View >> Sensor Readings to display the Readings window where Rate,
Thickness, and Frequency raw data for individual Sensors, the calculated
remaining Life of each crystal, and the Control method used for each Sensor are
displayed. See
Figure 2-53 .
Figure 2-53 Readings window