2 selecting a material, 3 configuring a film – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
When the desired thickness is reached, the evaporation source is set to feed or idle
power. At this point the process may be complete, or deposition of another film
layer may begin. Up to six separate films can be codeposited within a single layer.
There is no practical limit to the total number of processes, layers, or materials that
can be stored in the process database.
2.4.2 Selecting a Material
Click Edit >> Materials (refer to
). Select the material to
be deposited from the Material list. If the material is not listed, click New and create
a list item with a user supplied name, density, and Z-Ratio. Click OK to save
changes.
2.4.3 Configuring a Film
1
Click Edit >> Film (refer to
).
2
Click New to create and name a new film (refer to
3
On the Deposit tab (refer to
section 2.3.3.5.8 on page 2-31
), enter Loop,
Shutter Delay, and Rate Sampling parameters.
4
On the Condition tab (refer to
section 2.3.3.5.9 on page 2-34
precondition and postcondition parameters.
5
On the Source/Sensor tab (refer to
section 2.3.3.5.10 on page 2-36
), select
the material to be used for the film from the Material list. Then, enter maximum
power, slew rate, and sensor tooling for each sensor in the system.
6
On the Errors tab (refer to
section 2.3.3.5.11 on page 2-37
), click Ignore, Stop
Layer, or Timer Power in the On Error pane, and then click Enabled. Enter
parameters for Control Error, Crystal Quality, Crystal Fail, and/or Crystal
Stability if required by the process.
7
Configure all of the films for the process by repeating steps 1 through 5 for each
source.
8
Click OK to save changes.