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6 films – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual

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IQS-233 Operating Manual

2.3.3.5.6 Films

Click Edit >> Films to display the Film Edit window where the configuration for a
new Film can be created and an existing Film can be renamed, copied, or deleted.
See

Figure 2-24

.

Figure 2-24 Film Edit window

Edit commands, see

section 2.3.3.5.7

Deposit tab, see

section 2.3.3.5.8 on page 2-31

Condition tab, see

section 2.3.3.5.9 on page 2-34

Source/Sensor tab, see

section 2.3.3.5.10 on page 2-36

Errors tab, see

section 2.3.3.5.11 on page 2-37