INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
Stop Layer . . . . . . . . . . . . . Stops the deposition phase and sets source output
power to zero. This allows the cause of the error to
be corrected before continuing the deposition phase,
or allows the deposition phase to be completed
using manual control.
Timer Power . . . . . . . . . . . . A constant power level, based on the last "good" rate
measurements before the error occurs, is used to
complete the deposition phase.
NOTE: A good rate is defined as a rate not exceeding the Control Error % value
(if Control Error is selected), or not exceeding ±10% rate deviation (if
Control Error is cleared).
Control Error pane
If the PID control loop cannot achieve a deposition rate within a specified
percentage of the desired rate for a specified time period, the action selected in the
On Error pane is initiated.
HINT: Shutter Delay can ensure adequate rate control before the deposition
phase starts. Refer to
section 2.3.3.5.8 on page 2-31
Enabled . . . . . . . . . . . . . . . Select the check box to activate the Control Error
command
(%) . . . . . . . . . . . . . . . . . . . . 0 to 30%
The ± percentage (the sign is not entered before the
value) of deviation from the desired rate that when
exceeded for a specified time (sec) initiates the On
Error selection.
(sec). . . . . . . . . . . . . . . . . . . 0 to 99 s
The period of time the rate must exceed the (%)
value before the On Error selection is initiated.