INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
Manual Start . . . . . . . . . . . . The previous layer ends at its idle power. In the
IQS-233 Codeposition window, click Start Layer to
start the next Layer.
Auto Start . . . . . . . . . . . . . . Starts the next Layer automatically upon completion
of the previous Layer.
Skip Pre Cond . . . . . . . . . . Skips the precondition phases.
NOTE: The Start Mode selection must be the same
for all related Codeposition Layers.
Indexers pane
NOTE: A Programmable Logic Controller (PLC) is required to provide the relays
needed for control of an Indexer. See
Source Index. . . . . . . . . . . . None, 0 to 15
The Source Indexer pocket used by the selected
Layer. This value is sent to the PLC at the start of the
Layer.
Substrate Index . . . . . . . . . None, 0 to 4
The Substrate Indexer pocket used by the selected
Layer. This value is sent to the PLC at the start of the
Layer.
User 1 Index . . . . . . . . . . . . None, 0 to 15
The index value used by the selected Layer. This
value is sent to the PLC at the start of the Layer for
use as needed. A common application is to select
external equipment configurations.
User 2 Index . . . . . . . . . . . . None, 0 to 15
The index value used by the selected Layer. This
value is sent to the PLC at the start of the Layer for
use as needed. A common application is to select
external equipment configurations.
NOTE: To change the name of the User 1 and User 2 Index as it appears in
IQS-233 Codeposition software, open the InitConfig.xml file located at
C:\ProgramData\INFICON\IQS-233, and change the name of the indexer
in quotation marks located on lines 23 and 24 of the document. Save the
document.
<
LayerIdx
Name
=
"
User 1
"
Timeout
=
"
30
"
Done
=
"
False
"
End
=
"
15
"
Start
=
"
0
"
>
2
LayerIdx
>
<
LayerIdx
Name
=
"
User 2
"
Timeout
=
"
30
"
Done
=
"
false
"
End
=
"
15
"
Start
=
"
0
"
>
3
LayerIdx
>
Do not change any other portion of the document. Doing so may cause
IQS-233 Codeposition software not to operate properly.