INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 123)

4 - 9
IP
N 07
4-
58
5-
P1
A
IQS-233 Operating Manual
7 Determine the Dead Time (refer to Figure 4-2 on page 4-6 )
7a Slowly increase power until the desired rate is achieved.
7b Quickly adjust power by 1 to 2% and measure the time between when the
power is changed and when a change in rate is observed.
7c The time between the change in power and when the rate starts to change
is the Dead Time.
7d If finished, slowly decrease power to 0%, and then press Stop. Otherwise,
continue to step 9.
NOTE: It is common for the Dead Time of a fast source, such as an e-beam,
to be very small and possibly immeasurable. In this case, the Dead
Time can be considered zero.
8 Set Initial PID Values
8a Set the power to zero.
8b For a fast source (refer to section 4.5.1 on page 4-6 )
 In the Deposit tab on the Film Edit window (Edit >> Films):
 Set P to 25.
 Set I to the TIME
SR
value (calculated in step 7) or zero.
 Set D to zero.
8c For a slow source (refer to section 4.5.1 on page 4-6 )
 In the Deposit tab on the Film Edit window (Edit >> Films):
 Set P to 25.
 Set I to the TIME
SR
value (calculated in step 7).
 Set D to the Dead Time value (calculated in step 8).