4 rate graph – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
2.3.7.4 Rate Graph
Click Rate Graph to display the Rate Graph window. See
The Rate Graph window displays deposition rate versus time. If more than one
sensor is mapped to the output used by the current Layer, the displayed Rate is an
average of the rates for the individual sensors.
NOTE: For a Codeposition Layer, the Deposition Rate of each Film will be
displayed on the graph.
Figure 2-62 Rate Graph window
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