Figure 2-51 – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
For a sequential Layer, the name of the Film used in the Layer is displayed at the
top of the pane.
For a Codeposition Layer, the names of the Films used in the Layers comprising
the Codeposition Layer are displayed at the top of the pane.
The name displayed at the top of the name list corresponds to the Layer using
the lowest numbered physical output.
The name at the bottom of the list corresponds to the Layer using the highest
numbered physical output.
NOTE: The physical output number for an Output name is configured in the
Outputs tab of the System Setup window.
Select the Film name corresponding to a particular Layer of the Codeposition Layer
to display the frequently used parameters for that Layer.
Figure 2-51 IQS-233 Codeposition window - frequently used Layer parameters for PID loop control
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