INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 113)

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IQS-233 Operating Manual
4 The COMM LED on the PLC will flash several times a second when the
Address and Comm Port are set properly.
5 The Test pane of the I/O tab provides a means of testing PLC communications
and digital I/O wiring.
To test a PLC relay:
5a Note which event is assigned to the relay in Relay Events.
5b Select the same event name from the Test list.
5c Click Set to close the relay.
5d Click Clear to open the relay. Refer to Figure 3-1 .
6 The Indexers tab of the System Setup window allows the moving of a source
or substrate indexer. Select the index (i.e., pocket) to activate, then click the
Move button. (Refer to
Figure 2-39 on page 2-50 ).
3.4 PLC Programming
The PLC runs a small ladder logic program that communicates with
IQS-233 Codeposition software. This program transfers external relay and input
states from the PLC connecting block to internal PLC registers. IQS-233 software
reads/writes to those registers.
The IQS-233 software preset commands are adequate for most applications.
Additional logic commands can be programmed using the PLC software. Refer to
the PLC operating manual for more information on additional ladder logic
programming.
The following commands of the internal PLC registers are used by
IQS-233 Codeposition software.
PLC Register IQS-233 Software Command
200 Layer/Phase Register
Bits 0-9 are BCD layer number running
Bits 10-15 are BCD Phase# as shown below
00 Application Startup
09 Shutter Delay Phase
01 Program Initializing 10 Deposit Phase
02 Not Used 11 Layer Stopped
03 Not Used 12 Layer Starting
04 Process Stopped 13 Not Used
05 Ramp1 Phase 14 Feed Ramp Phase
06 Soak1 Phase 15 Feed Hold Phase
07 Ramp2 Phase 16 Idle Ramp Phase
08 Soak2 Phase 17 Idle Phase
18 Continuous Phase