Appendix a material table, A.1 introduction, Appendix a – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
Appendix A
Material Table
A.1 Introduction
represents the density and Z-Ratio for various materials. The list is
alphabetical by chemical formula.
An * is used to indicate that a Z-Ratio has not been established for a certain
material. A value of 1.000 is defaulted in these situations. To determine the Z-Ratio
where the Z-Ratio for a material has not been established, refer to
Determining Z-Ratio, on page 4-3
WARNING
Some of these materials are toxic. Consult their material
safety data sheet and safety instructions before use.
Table A-1 Material table
Formula
Density
Z-Ratio
Material Name
Ag
10.500
0.529
silver
AgBr
6.470
1.180
silver bromide
AgCl
5.560
1.320
silver chloride
Al
2.700
1.080
aluminum
Al
2
O
3
3.970
0.336
aluminum oxide
Al
4
C
3
2.360
*1.000
aluminum carbide
AIF
3
3.070
*1.000
aluminum fluoride
AIN
3.260
*1.000
aluminum nitride
AlSb
4.360
0.743
aluminum antimonide
As
5.730
0.966
arsenic
As
2
Se
3
4.750
*1.000
arsenic selenide
Au
19.300
0.381
gold
B
2.370
0.389
boron
B
2
0
3
1.820
*1.000
boron oxide
B
4
C
2.370
*1.000
boron carbide
BN
1.860
*1.000
boron nitride