INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 16)

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IQS-233 Operating Manual
Input . . . . . . . . . . . . . . . . . . . Sensor(s), Timed Power
Setpoint Å/s . . . . . . . . . . . . . -999.90 to 999.90 Å/s
Setpoint % Pwr. . . . . . . . . . . 0.00 to 100.00% Power
Final Thickness . . . . . . . . . . 0.000 to 999.900 kÅ
Thickness Endpoint . . . . . . . 0.000 to 999.900 kÅ
Time Endpoint . . . . . . . . . . . 0.00 to 30000.00 s
Start Mode . . . . . . . . . . . . . . Manual Start, Auto Start, Skip Pre Cond
Source Indexers . . . . . . . . . . IQM-233: 6
SQM-242: 4
Index Pockets. . . . . . . . . . . . 0 to 15
Timeout . . . . . . . . . . . . . . . . 0 to 3000 s
Substrate Indexer. . . . . . . . . 1
Index Pockets. . . . . . . . . . . . 0 to 4
Timeout . . . . . . . . . . . . . . . . 0 to 3000 s
User Indexers. . . . . . . . . . . . 2
Index Pockets. . . . . . . . . . . . 0 to 15
Timeout . . . . . . . . . . . . . . . . 0 to 3000 s
Rate Ramps . . . . . . . . . . . . . Unlimited number of Rate Ramps
Start Thickness. . . . . . . . . . . 0.000 to 999.900 kÅ
Ramp Time. . . . . . . . . . . . . . 0.00 to 30000 s
Setpoint Å/s . . . . . . . . . . . . . -999.90 to 999.90 Å/s
Setpoint % Pwr. . . . . . . . . . . 0.00 to 100.00% Power
1.3.3 Film Parameters
Films. . . . . . . . . . . . . . . . . . . Unlimited number of films
Film Name . . . . . . . . . . . . . . 15 characters maximum
P Term . . . . . . . . . . . . . . . . . 0 to 9999
I Term . . . . . . . . . . . . . . . . . . 0.0 to 999.9 s
D Term . . . . . . . . . . . . . . . . . 0.00 to 99.90 s
Shutter Delay Accuracy . . . . 0.0 to 30.0%
Shutter Delay Wait . . . . . . . . 0.00 to 30000 s
Shutter Delay Hold . . . . . . . . 0.00 to 30000 s