INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual

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IQS-233 Operating Manual

201

Sensors/Outputs 1-4 Register (updated each layer)

Bits 0-7 are sensors used (1=used, 0=unused)
Bits 12-15 are outputs used, 12 is Out1, 13 is Out2, etc.

202

Analog/Outputs 5-6 Register (updated each layer)

Bits 0-3 are analog inputs used (1=used, 0=unused)
Bits 4-5 outputs used, 4 is Out5, 5 is Out6
Bits 8-11 are BCD of Output source index
Bits 12-15 are BCD of Output 6 source index

220

Source Index Register (updated each layer)

Bits 0-3 are BCD of Output 1 source index
Bits 4-7 are BCD of Output 2 source index
Bits 8-11 are BCD of Output 3 source index
Bits 12-15 are BCD of Output 4 source index

221

Source Indexer Done Flag

Bit 0 is Source Indexer 1 (1= Indexer Done, 0=Not Done)
Bit 1 is Source Indexer 2
Bit 2 is Source Indexer 3
Bit 3 is Source Indexer 4
Bit 4 is Source Indexer 5
Bit 6 is Source Indexer 6

222

Relays 1-16

Bit 0 is Relay 1, etc.

224

Inputs 1-12

Bit 0 is Input 1, etc.

225

Layer Index Register

Bits 0-3 are BCD of Layer Indexer 1
Bits 4-7 are BCD of Layer Indexer 2
Bits 8-15 are BCD of Layer Indexer 3

226

Layer Indexer Done Flag

Bit 0 is Layer Indexer 1 (1= Indexer Done, 0=Not Done)
Bit 1 is Layer Indexer 2
Bit 2 is Layer Indexer 3