INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 95)

6 - 9
PN
07
4-
58
4-
P1
A
IQM-233 Operating Manual
8 Determine the Dead Time (refer to Figure 6-2 )
 Slowly increase power until the desired rate is achieved.
 Quickly adjust Power by 1 to 2% and measure the time between when the
power is changed and when a change in rate is observed.
 The time between the change in power and when the rate starts to change
is the Dead Time.
 If finished, slowly decrease power to 0%, and then press Stop. Otherwise,
continue at step 9.
NOTE: It is common for the Dead Time of a fast source, such as an e-beam,
to be very small and possibly immeasurable. In this case, the Dead
Time can be considered zero.
9 Set Initial PID Values
 Set the power to zero.
9a For a fast source (refer to section 6.5.1 )
 In the Source Setup window (Setup >> Source):
 Set P to 25.
 Set I to the TIME
SR
value (calculated in step 7) or zero.
 Set D to zero.
9b For a slow source (refer to section 6.5.1 )
 In the Source Setup window (Setup >> Source):
 Set P to 25.
 Set I to the TIME
SR
value (calculated in step 7).
 Set D to the Dead Time value (calculated in step 8).