INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual
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IQM-233 Operating Manual
Sif142Simulate (long Mode)
Sets the operating mode. Normal mode requires the IQM-233 card(s), sensors,
and a source power supply for proper operation. In simulate mode, no IQM-233
card is required. The DLL simulates the frequency readings and power output
required for PID loop control. The initial sensor frequency is fixed at 5.95 MHz
and approximately 50% output power is required to start simulating deposition.
Mode . . . . . . . . . . . . . . . . . . . . . 1 turns on simulate mode
0 turns on normal mode
Sif142StartMeas ()
Starts the card measuring frequency and zeros the sensor thickness reading.
Sif142ZeroSensor (long SensorNum)
Sets a sensor (0 to 23) thickness reading to zero.
Sif142Zero2 (long OutputNum)
Sets a control output (0 to 17) thickness reading for each assigned sensor to
zero.
Sif142Material (long Sensor, double Density, double
Zfact, double Tooling)
Sets up the material-specific parameters for each sensor.
Sensor . . . . . . . . . . . . . . . . . . . . A bit-weighted value for sensor(s). The three
lowest bits determine the selected sensor(s).
Add the bits to select multiple sensors, for
example, send 111 to select all three
sensors.
001 = Sensor 1
010 = Sensor 2
100 = Sensor 3
Density. . . . . . . . . . . . . . . . . . . . Sets the density of the material. Values are
from 0.4 to 99.99 g/cm
3
Zfact . . . . . . . . . . . . . . . . . . . . . . Z-Ratio (Z-Factor) of the material. This
number has no units, and can be found in
. Values are from
0.100 to 9.999.
Tooling. . . . . . . . . . . . . . . . . . . . Accounts for the difference in deposition rate
at the sensor vs. the substrate. Values are a
range from 0 to 9.99, representing 0 to 999%.
Refer to