INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 22)

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IQM-233 Operating Manual
1.6.2 Accessories
1.6.2.1 Software (Optional)
IQS-233 Codeposition Software. . . . . . . . . . . . . . . . PN 782-IQS-233
1.6.2.2 Cables and Oscillator Kits
SMA/BNC Adapter Cable. . . . . . . . . . . . . . . . . . . . . PN 600-1441-P1
Oscillator Kit (3.0 m (10 ft.) cable) . . . . . . . . . . . . . . PN 782-934-003-10
Oscillator Kit (7.6 m (25 ft.) cable) . . . . . . . . . . . . . . PN 782-934-003-25
Oscillator Kit (15.2 m (50 ft.) cable) . . . . . . . . . . . . . PN 782-934-003-50
Oscillator Kit (30.5 m (100 ft.) cable) . . . . . . . . . . . . PN 782-934-003-99
NOTE: One oscillator kit and one SMA/BNC adapter cable are required for each
crystal sensor that will be connected to the IQM-233 card.
1.6.2.3 Crystal Sensors
NOTE: "X" represents feature selections. Contact INFICON for assistance.
Front Load Single Sensor . . . . . . . . . . . . . . . . . . . . PN SL-XXXXX
Front Load Dual Sensor . . . . . . . . . . . . . . . . . . . . . . PN DL-AXXX
Front Load UHV Bakeable Sensor. . . . . . . . . . . . . . PN BK-AXF
Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . . PN CDS-XXFXX
Cool Drawer Dual Sensor . . . . . . . . . . . . . . . . . . . . PN CDD-XFXX
Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . PN 750-618-G1
NOTE: Shuttered sensors require a solenoid valve (PN 750-420-G1), a PLC, and
optional IQS-233 Codeposition software for shutter control. See section
2.1.2.5, Digital I/O Connections, on page 2-18 .
NOTE: CrystalSix, Crystal12, and RSH-600 rotary sensors are not compatible with
the IQM-233 card.
NOTE: The CrystalTwo switch is not compatible with the IQM-233 card.
CAUTION
For proper performance of the IQM-233 card, the crystal
sensor in-vacuum cable (Front Load and Sputtering
sensors) or electrical conduit tube (Cool Drawer and
Bakeable sensors) should not exceed 78.1 cm (30.75 in.).