INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 88)

6 - 2
PN
07
4-
58
4-
P1
A
IQM-233 Operating Manual
6 Determine the new density value with equation [1] :
[1]
where:
D
i
= Initial density setting
T
x
= Thickness reading on IQM-233
T
m
= Measured thickness
7 Round off density to the nearest 0.01 g/cm 3 .
8 A quick check of the calculated density may be made by programming the
IQM-233 with the new density value and observing that the displayed thickness
is equal to the measured thickness, provided that the IQM-233's thickness has
not been zeroed between the test deposition and entering the calculated
density.
NOTE: Due to variations in source distribution and other system factors, it is
recommended that a minimum of three separate evaporations be made to
obtain an average value for density.
NOTE: Slight adjustment of density may be necessary in order to
achieve T
x
= T
m
.
6.3 Determining Tooling
1 Place a test substrate in the system's substrate holder.
2 Make a short deposition.
3 Remove the test substrate and measure the film thickness with a multiple beam
interferometer or a stylus-type profilometer.
4 Calculate Tooling from the relationship shown in equation [2] :
[2]
where
T
m
= Actual thickness at substrate holder
T
x
= Thickness reading in the IQM-233 software
TF
i
= Initial Tooling factor
Density g cm
3
   D
i
T
x
T
m
-------
 
 
 
=
Tooling (%) TF
i
T
m
T
x
-------
 
 
 
=