INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 53)

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IQM-233 Operating Manual
Sensor Fields
The Sensor 1, Sensor 2, and Sensor 3 fields correspond to the sensor(s)
connected to the SMA connectors on the IQM-233 card, with Sensor 1
corresponding to the SMA connector closest to the D-sub connector (refer to
Figure 2-7 on page 2-9 ). Each sensor field contains the following parameters:
Density (g/cm
3
) . . . . . . . . . . . . . . . . 0.4 to 99.99 g/cm
3
Enter the density of the material to be deposited using the corresponding
sensor. See
Table A-1 for material density values. The default value is 1.00. If
the density value is not available for a material, see section 6.2, Determining
Density, on page 6-1 .
Tooling (%) . . . . . . . . . . . . . . . . . . . 0.00 to 999.00
Enter a Tooling value to compensate for differences in the measured deposition
rate and actual deposition rate at the substrate due to the sensor or substrate
geometry (see
Figure 3-13 ). The default value is 100.00. To determine the
Tooling value, see section 6.3, Determining Tooling, on page 6-2 .
Figure 3-13 Tooling settings
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 9.999
Enter a Z-Ratio value specific to the material being deposited to compensate
for the mechanical elasticity of the material to the quartz crystal. See
Table A-1
for material Z-Ratio values.
If the Z-Ratio of a material is not known, enter the default value of 1.000 for
Z-Ratio. Z-Ratio has a smaller effect when the crystal is relatively new. To
determine Z-Ratio experimentally, see
section 6.4, Determining Z-Ratio, on
page 6-3 .
NOTE: Click OK to save the Sensor Setup parameters.
Substrate
Substrate
Tooling
Over 100%
Tooling
Under 100%
Tooling over 100% Tooling under 100%
Substrate
Substrate