2 iqm-233 standard software features, 3 iqs-233 codeposition software features – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual

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IQM-233 Operating Manual

1.1.2 IQM-233 Standard Software Features



Basic setup and control of one IQM-233 card or one SQM-242 card
(SAM-242 card not supported)



Single layer process setup



Single layer monitoring of up to three quartz crystal sensors
(up to four sensors for SQM-242)



Single layer codeposition of up to three sources
(up to two sources for SQM-242)



Compatible with all INFICON non-shuttered single sensors:
Front Load, Cool Drawer, Bakeable, and Sputtering

NOTE: Shuttered sensors require a PLC and IQS-233 Codeposition software

for automatic shutter control.

NOTE: Not compatible with CrystalSix, Crystal12, and RSH-600 rotary

sensors.

NOTE: Not compatible with the CrystalTwo switch.

1.1.3 IQS-233 Codeposition Software Features



Advanced setup and control of up to two IQM-233 cards or two SQM-242 cards
(SAM-242 card not supported)



Multi-layer process setup



Codeposition of up to six sources (up to four sources for SQM-242 card)



Easy PLC integration for event-selectable relay functions and shutter control



Compatible with all INFICON single and dual sensors:
Front Load, Cool Drawer, Bakeable, Sputtering

NOTE: Shuttered sensors require a PLC for automatic shutter control.

NOTE: Not compatible with CrystalSix, Crystal12, and RSH-600 rotary

sensors.

NOTE: Not compatible with the CrystalTwo switch.