2 maintenance, 3 spare parts – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual
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IQM-233 Operating Manual
5.2 Maintenance
Routine maintenance is not required for the IQM-233 card. However, the computer
the IQM-233 card is installed in should be operated in a clean environment. If
cleaning of the inside of the computer (and therefore the IQM-233 card) becomes
necessary due to dust accumulation, follow the computer manufacturer’s cleaning
recommendation.
5.3 Spare Parts
Oscillator . . . . . . . . . . . . . . . . . . . . . PN 782-900-010
SMA/BNC Adapter Cable . . . . . . . . . PN 600-1441-P1
BNC Cable (15.2 cm (6 in.)) . . . . . . . PN 782-902-011
BNC Cable (3.0 m (10 ft.)) . . . . . . . . PN 782-902-012-10
BNC Cable (7.6 m (25 ft.)) . . . . . . . . PN 782-902-012-25
BNC Cable (15.2 m (50 ft.)) . . . . . . . PN 782-902-012-50
BNC Cable (30.5 m (100 ft.)) . . . . . . PN 782-902-012-99
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