INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 52)

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IQM-233 Operating Manual
Display Pane
Units . . . . . . . . . . . . . . . . . . . . . Thickness, Mass
Click ▼ and then select from the list the unit of measure for the Rate (Å/s)
and Thickness (kÅ) readouts in the IQM-233 Standard window (refer to
Figure 3-8 on page 3-7 ).
If Thickness is selected:
 The Rate (Å/s) value is in units of Å/s
 The Thickness (kÅ) value is in units of kÅ
If Mass is selected:
 The Rate (Å/s) value is in units of ng/cm
2
/s
 The Thickness (kÅ) value is in units of ug/cm
2
NOTE: The desired Rate (Å/s) and Final Thickness (kÅ) parameters in
the Source window are not affected by the Units selection, and
these values are entered as units of Å/s and kÅ, respectively. See
section 3.3.3.1.4, Source, on page 3-14 .
Control Enabled
Select the check box to display the Source Information pane in addition to
the Sensor Information pane on the IQM-233 Standard window (refer to
Figure 3-8 on page 3-7 ). The Source Information pane provides additional
operating functions and readouts for PID closed-loop control or manual
control of up to three deposition sources.
NOTE: Click OK to save the Setup parameters.
3.3.3.1.3 Sensor
Click Setup >> Sensor on the menu bar to display the Sensor Setup window,
where Density and Z-Ratio values specific to the material to be deposited, and a
Tooling value to compensate for sensor/source geometry, are entered. See
Figure
3-12 .
Figure 3-12 Sensor Setup window