INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 78)

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IQM-233 Operating Manual
Freq (Hz) displays Fail. Sensor not connected, or
bad electrical connection in
sensor head or feedthrough,
or bad cables. Check sensor connections.
Use an ohmmeter to check
electrical continuity / isolation
of sensor head, feedthrough,
in-vacuum cable, SMA/BNC
adapter cable, and BNC
cables. Refer to the sensor’s
operating manual for detailed
troubleshooting information.
Substitute a 5.5 MHz test
crystal or a known good
sensor for the suspect
sensor. Refer to
section
2.1.2.2.1, Sensor
Connection Troubleshooting,
on page 2-12
.
Bad coax cable between
feedthrough and oscillator, or
bad coax cable between
oscillator and IQM-233 card. Use an ohmmeter to check
electrical continuity /
isolation.
Substitute a known good
coax cable.
IQM-233 card or oscillator is
malfunctioning. Substitute a known good
IQM-233 card (or other
QCM).
Substitute a known good
oscillator.
Substitute a 5.5 MHz test
crystal or a known good
sensor for the sensor. Refer
to
section 2.1.2.2.1, Sensor
Connection Troubleshooting,
on page 2-12
.
Table 5-1 Symptom/Cause/Remedy Chart (continued)
SYMPTOM CAUSE REMEDY