INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual
Page 94
6 - 8
PN
07
4-
58
4-
P1
A
IQM-233 Operating Manual
5
Set Filter Readings Parameter
In the Setup window (Setup >> General):
Set the Measurement Period to the desired value.
Test the setup following step 4 above.
If rate noise is present with Filter Readings setting of 1, slowly increase the
value from 1 to a higher value until the rate display noise is minimized.
NOTE: If Filter Readings is set too high, the display will lag the true system
response and may hide significant problems.
6
Determine Max Power
Verify Source Control is set to Manual and click Start.
Slowly increase power until the desired rate is achieved.
Record the Power reading at the desired rate as PWR
DR
.
Set Max Power (%) to a value 20% higher than PWR
DR
.
If finished, slowly decrease power to 0%, and then press Stop. Otherwise,
continue to step 7.
7
Determine Open Loop Response Time (refer to
Calculate 1/3 of the desired rate (RATE
1/3
), and 2/3 of the desired rate
(RATE
2/3
).
Slowly adjust the power until the rate matches RATE
1/3
and is steady.
Quickly adjust Power (%) to PWR
DR
and measure the time for the rate to
equal RATE
2/3
.
Twice the measured time is the step response time, TIME
SR
.
If finished, slowly decrease power to 0%, and then press Stop. Otherwise,
continue to step 8.
NOTE: TIME
SR
is typically 0.2 to 1 second for e-beam evaporation and at least
5 seconds for thermal evaporation.
NOTE: It is recommended to repeat this step several times to get an average
response time.