INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 18)

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IQM-233 Operating Manual
1.4 IQM-233 Specifications
1.4.1 Measurement
Crystal Frequency Range. . . . . . . . . 4.000 MHz to 6.100 MHz
Frequency Resolution . . . . . . . . . . . 0.05 Hz @ 6 MHz
(0.50 s measurement period)
Reference Frequency Stability . . . . . ±50 ppm (0 to 50°C)
Thickness Resolution . . . . . . . . . . . . 0.0613 Å/s/measurement,
(density = 1.00, Z-Ratio = 1.000,
measurement period = 0.5 s,
crystal frequency = 6.0 MHz)
Thickness Accuracy . . . . . . . . . . . . . Dependent on process conditions,
especially sensor location, material stress,
temperature, and density
Measurement Period . . . . . . . . . . . . 0.1 to 2 s
Measurement Technique . . . . . . . . . Active Oscillation
Number of Sensors . . . . . . . . . . . . . 3
1.4.2 Source Outputs
Number of Outputs . . . . . . . . . . . . . . 3
Output Connector. . . . . . . . . . . . . . . 15-pin high-density D-sub
Output Voltage . . . . . . . . . . . . . . . . . 0 to ±10 V(dc)
Output Impedance . . . . . . . . . . . . . . 50 Ω
Output Resolution . . . . . . . . . . . . . . 15-bit plus sign