INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 34)

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IQM-233 Operating Manual
14 In the IQM-233 Standard window, verify that Freq (Hz) is approximately the
starting frequency of the new crystal for all connected sensors (see
Figure
2-12 ). If the Freq (Hz) reading is incorrect or Fail is displayed for a connected
sensor, see section 2.1.2.2.1 .
NOTE: Sensors do not need to be under vacuum for frequency verification.
NOTE: The Freq readout for Sensor channels not connected to a sensor
should display Fail.
Figure 2-12 Freq (Hz) readout
2.1.2.2.1 Sensor Connection Troubleshooting
Perform the following steps if the reported frequency is not correct or if Fail is
displayed for a Sensor channel connected to a sensor.
1 In the Setup window (refer to Figure 2-11 ), type or select values for Maximum
Crystal Freq, Initial Crystal Freq, and Minimum Crystal Freq appropriate for
a 5.5 MHz test crystal (refer to
Table 2-1 ).
2 Click OK to save the configuration.
3 Disconnect the short BNC cable from the sensor feedthrough.
4 Connect the 5.5 MHz Test Crystal to the short BNC cable. See Figure 2-13 .
 If the Freq (Hz) reading for the test crystal is close to 5.5 MHz, the sensor,
feedthrough, or the sensor’s crystal is the cause of the incorrect or failed
reading. Refer to the sensor’s operating manual for troubleshooting
information.
 If the Freq (Hz) reading for the test crystal is not close to 5.5 MHz or the
reading displays Fail, contact INFICON. Refer to
section 1.3, How To
Contact INFICON, on page 1-5 .