INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 79)

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IQM-233 Operating Manual
Freq (Hz) displays Fail
during deposition before
“normal” life of crystal is
exceeded. Crystal is being hit by small
droplets of molten material
from the evaporation source. Use a shutter to shield the
sensor during source
conditioning.
Move the crystal farther away
(at least 25.4 cm (10 in.))
from the source.
Damaged crystal or
deposited material is causing
stress to crystal. Replace the crystal.
Use an Alloy crystal if
appropriate for deposited
material.
Material build-up on crystal
holder is partially masking
the crystal surface. Clean or replace the crystal
holder.
Freq (Hz) displays Fail
during deposition before
“normal” life of crystal is
exceeded. Shutter is partially
obstructing deposition flux or
sensor is poorly positioned,
causing uneven distribution
of material on crystal. Visually check crystal for an
uneven coating, and if
present, correct shutter or
sensor positioning problem.
Freq (Hz) displays Fail
when vacuum chamber is
opened to air. Crystal was near the end of
its life; opening to air causes
film oxidation, which
increases film stress. Replace the crystal.
Excessive moisture
accumulation on the crystal. Avoid condensation by
turning off cooling water to
sensor before opening the
vacuum chamber to air, and
then flow heated water above
the room’s dew point through
the sensor when the
chamber is open.
Table 5-1 Symptom/Cause/Remedy Chart (continued)
SYMPTOM CAUSE REMEDY