INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 59)

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IQM-233 Operating Manual
The Source Information pane is displayed below the Sensor Information pane
when the Control Enabled check box is selected in the Setup window. This pane
allows a deposition to be controlled using PID closed-loop or manual source
control.
The readouts on the Sensor Information pane are described by section 3.3.4.1,
Sensor Information Pane Readouts, on page 3-19 .
The readouts on the Source Information pane are described by section 3.3.4.2,
Source Information Pane Readouts, on page 3-21 .
The operating functions on the IQM-233 Standard window are described by
section 3.3.4.3, Global Operating Functions, on page 3-22 and section 3.3.4.4,
Source Control Operating Functions, on page 3-23 .
The About IQM-233 Standard window provides software and hardware
information. See
section 3.3.4.6, About IQM-233 Standard Window, on page 3-25 .
The IQM-233 Standard software is configured by the Setup list on the menu bar,
the Map Sensor list in the Sensor Information pane, and the Source Control list
in the Source Information pane. Refer to
section 3.3.3, Software Configuration, on
page 3-8 .
3.3.4.1 Sensor Information Pane Readouts
Figure 3-20 Sensor Information pane - readouts
Sensor Fields
The Sensor 1, Sensor 2, and Sensor 3 fields correspond to the crystal
sensor(s) connected to the SMA connector(s) on the IQM-233 card, with
Sensor 1 corresponding to the SMA connector closest to the D-sub connector.
Each Sensor field displays the following readouts: