INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual - Manual (Page 60)

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IQM-233 Operating Manual
Thickness (kÅ) . . . . . . . . . . . . . . . . 0.0000 to 999.90 kÅ
The calculated thickness of material deposited on the substrate, based on the
thickness measured by the corresponding sensor. The thickness calculation is
affected by the Density, Z-Ratio, and Tooling values displayed in the Sensor
Setup window. Refer to
Figure 3-12 on page 3-12 .
Rate (Å/s) . . . . . . . . . . . . . . . . . . . . –999.9 to 999.9 Å/s
The calculated rate of deposition at the substrate. The rate calculation is
affected by the Density, Z-Ratio, and Tooling values in the Sensor Setup
window (refer to
Figure 3-12 on page 3-12 ) and the Measurement Period and
Filter Readings values displayed in the Setup window (refer to Figure 3-11 on
page 3-10 ).
Freq (Hz) . . . . . . . . . . . . . . . . . . . . . 4000000.00 to 6100000.00 Hz, Fail
The fundamental frequency of the crystal. Fail is displayed when no sensor is
connected, no frequency is detected, or the frequency is not within the limits of
the Crystal Frequency settings in the Setup window. Refer to
Figure 3-11 on
page 3-10 .
Life (%) . . . . . . . . . . . . . . . . . . . . . . 0 to 100%
Represents the maximum possible percentage of crystal life remaining before
a crystal Fail is displayed by the Freq (Hz) readout. The Life (%) value is
dependent on material properties and process conditions, and is affected by
the Crystal Frequency settings in the Setup window (refer to
Figure 3-11 on
page 3-10 ). The Life (%) value for a new crystal is at or near 100. When Fail is
displayed by the Freq (Hz) readout, "?" is displayed by Life (%).